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Silex Silex is one of the worlds leading manufacturing services company in MEMS (MicroElectroMechanicalSystems). Silex custom products and manufacturing services to MEMS customers worldwide. HQ in Sweden and foundries in USA, the Silex Manufacturing Facility is currently running 80K wafer/year with six-inch wafer foundry. The Silex team is one of the most experienced MEMS teams in the world.Website: http://www.silexmicrosystems.com/
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Coventor CoventorWare is the most comprehensive suite of MEMS design tools in the industry. It acts as a seamless integrated design environment that reduces design risk, speeds time-to-market and lowers development costs. The CoventorWare methodology enables schematic-based behavioral modeling and detailed 3-D multi-physics numerical analysis to support virtually every MEMS application, from automotive sensors to RF devices, optical MEMS to microfluidics.CoventorWare has 4 main modules Architect: a schematic-based system-level modeling environment used to quickly explore design alternatives and optimize performance. Designer: a physical design tool that contains a 2-D layout editor, materials property editor and database, as well as an automatic 3-D model generator. Analyzer: Multiphysics Numerical analysis framework. Integrator: creates non-linear complex reduced-order MEMS models from detailed models created in ANALYZER that run in system simulation tools.More Info : http://www.coventor.com/coventorware.html 
Products Description
Memulator MEMulator is a new software tool from Coventor that enables MEMS designers and process engineers to visualize the effects of design and process modifications before fabricating an actual device. Starting from 2D masks in industry-standard GDSII format and a description of the fabrication process. MEMulator? uses novel “voxel” (volumetric pixel) technology to build highly detailed, realistic-looking virtual prototypes. The voxel technology is robust against mask errors and easily handles a wide range of model scales, all the way from micron-scale details through a complete device to an entire wafer. MEMulator is applicable to all devices that are fabricated with IC-style manufacturing techniques, including MEMS, RF passives, and disk-drive heads.More Info : http://www.coventor.com/semulator3d/virtualmanufacturing.html

Etch3D The Etch3D simulation software package offers process engineers and designers an accurate way to predict the outcome of wet anisotropic etching of silicon without having to conduct time consuming and costly calibration procedures.

EM3DS EM3DS (Electromagnetic 3D Solver) is a full-featured 3D tool tailored to efficiently analyze quasi-planar structures. Ideal for RF applications, EM3DS provides complete powerful pre- and post-processing tools allowing incredible insight into models, and preparations of high-quality device presentations. Key to its effectiveness, EM3DS provides method-of-moments (MoM) solvers for high-aspect ratio simulations (where the difference between the largest dimension and smallest dimension is substantial)Website: http://www.coventor.com/mems/em3ds/index.html

MEMS+ comes with a unified, 3-D model creation front-end (INNOVATOR) for customized parameterization and model consistency MEMS devices are inherently three-dimensional, which is why it is essential to have an intuitive 3-D user interface that guides the user through the 3-D design process. The MEMS+ Innovator plug-in makes the MEMS design process clear and understandable.ustomized parameterization means just that: the MEMS designer or MEMS design kit controls which variables, parameters and electrical and mechanical “pins” are exposed to the user of the models for simulation of physical layout.MEMS+ Innovator generates all the views needed in Cadence -Virtuoso, such as layout views, schematic views and simulation models (Spectre and UltraSim). MEMS+ Innovator also exports models for finite element analysis and for 3-D CAD tools.

MEMS+ Innovator is built on the latest development of parameterized electro mechanical models (PEM library). This guarantees that the user will have a behavioral model that can be connected to and simulated in the IC design.

More Info : http://www.coventor.com/memsplus/memsplus.html

Website : www.coventor.com


CoventorWare MEMS Updates

MEMS Ahead Blog What’s New Webinar

Demonstration of MEMS+ –> YouTube

Part1 – Demonstrates the capabilities of MEMS+ Innovator to build 3-D models

Part 2 – Demonstrates the connection to Cadence Virtuoso for MEMS+IC simulation and PCell Layout

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For more information on the tools, please kindly contact the following:Email: